PROCEDURE TESTING PARAMETERS OF FILM COATS AND SURFACES IN PROCESS OF THEIR CHANGE AND DEVICE FOR IS IMPLEMENTATION Russian patent published in 2003 - IPC

FIELD: nondestructive inspection of objects. SUBSTANCE: device incorporates X- ray source and registration system connected to technological system. Registration system shows capability for registration of reflected radiation simultaneously and independently at various angles within solid angle 0-π/2. Procedure is realized by irradiation of sample with X-ray flux with wave length λ, at angle θ and by simultaneous registration of reflected X-ray flux. Change of thickness of film coat is observed of oscillation of specular ray. Measuring angular distribution of radiation diffusely scattered by roughness it is possible to determine root-mean-square value σ of film surface. Density of material can be computed by change of contrast of oscillation of specular ray if change of σ is known. EFFECT: potential for generation of more objective information on topography of surface of film coat and on density of growing layer right in the run of technological process. 10 cl, 3 dwg