FIELD: microelectronics. SUBSTANCE: Schottky-barrier field-effect transistor built on semi-insulating substrate with unequally doped active layer has part of active layer spaced from gate at distance exceeding 0.08 mcm with dope concentration higher then 2·I017cm-3 and surface density of this dope / I,3÷2,5 /·I0I2cm-2; part of active layer between mentioned part and gate has mean dope concentration ≥2·I0I7cm-3. EFFECT: improved design. 6 dwg
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Authors
Dates
1997-10-20—Published
1993-03-10—Filed