DIAMOND-LIKE CARBON-BASED COATING AND METHOD OF MANUFACTURING THEREOF Russian patent published in 1997 - IPC

FIELD: carbon coatings. SUBSTANCE: invention relates to manufacturing material applicable in micro- and optoelectronics. A substrate is placed in microwave-frequency installation with discharge caused by exothermic chain reaction. Installation is evacuated to 2.10^-3 Pa, whereupon dichloromethane or another halogenated hydrocarbon is introduced and microwave-frequency discharge is allowed. Substrate is then removed from exothermic chain reaction zone. Coating based on diamond-like material with amorphous structure is formed exhibiting the following features: Raman spectrum peaks at 1317 and 1570 cm^-1 with intensity ratio corresponding to presence of at least 45% of SP³- hybridized carbon atoms characteristic of diamond phase, density at least 29000 kg/cu.m, no transmission in visible region of spectrum and transparency within wavelength range from 2 to 25 mcm. EFFECT: improved quality of coating. 3 cl, 2 dwg