PROCESS OF GROWING OF ORIENTED SYSTEMS OF WHISKERS AND GEAR FOR ITS IMPLEMENTATION ( VERSIONS ) Russian patent published in 1997 - IPC

FIELD: study of materials, electronics, vacuum microelectronics for growing of systems of whiskers for autoemission cathodes. SUBSTANCE: process is related to category of crystallization of substances from vapor phase and consists in transfer of substance for crystallization of whiskers from solid to substrate. Source of material and monocrystalline substrate oriented in special manner have flat surfaces. These surfaces face one another, are parallel and are at close distance. Temperature gradient is created and vector-homogeneous temperature field is provided between mentioned surfaces. Transfer of substance is provided by chemical reaction or by process of evaporation and condensation. Local growth of crystals is ensured by usage of agent-solvent that is deposited on substrate in form of particles through mask or by means of photolithographic process. In the latter case there is envisaged procedure excluding contact of solvent with boundary of separation " substrate-protective mask " used in photolithography. Gear proving for needed temperature field includes high-frequency heating source and special cone-cylindrical heated body. Another version of gear provides for one-side heating of source or substrate with the help of lasers or lamps. One more version provides for combination of all kinds of heating mentioned above. EFFECT: increased efficiency and productivity of process. 26 cl, 6 dwg