METHOD FOR MANUFACTURING INTEGRATED CIRCUITS AROUND CMOS TRANSISTORS Russian patent published in 2002 - IPC

Abstract RU 2185686 C2

FIELD: microelectronics. SUBSTANCE: combined process of forming separate and insulating silicon dioxide including thermal cleaning of plate surfaces with trichloroethylene and oxygen, modifying silicon dioxide precipitated from tetraethoxysilane at reduced pressure, followed by thermal annealing in trichloroethylene and oxygen improves and stabilizes electrophysical properties of silicon dioxide. EFFECT: enhanced yield of integrated circuits. 3 dwg

Similar patents RU2185686C2

Title	Year	Author	Number
METHOD FOR PRODUCING CMOS TRANSISTOR GATE REGIONS	2003	Manzha Nikolaj Mikhajlovich Dolgov Aleksej Nikolaevich Eremenko Aleksandr Nikolaevich	RU2297692C2
BIPOLAR CMOS DEVICE AND ITS MANUFACTURING PROCESS	2003	Manzha Nikolaj Mikhajlovich Dolgov Aleksej Nikolaevich Eremenko Aleksandr Nikolaevich Klychnikov Mikhail Ivanovich Kravchenko Dmitrij Grigor'Evich Lukasevich Mikhail Ivanovich	RU2282268C2
BICMOS DEVICE AND PROCESS OF ITS MANUFACTURE	1996	Krasnikov G.Ja. Kazurov B.I. Lukasevich M.I.	RU2106719C1
METHOD OF MANUFACTURING CMOS STRUCTURES	2015	Glukhov Aleksandr Viktorovich Rogulina Larisa Gennadevna Kurlenko Aleksandr Anatolevich	RU2665584C2
METHOD OF CMOS TRANSISTORS MANUFACTURING WITH RAISED ELECTRODES	2006	Manzha Nikolaj Mikhajlovich Saurov Aleksandr Nikolaevich	RU2329566C1
METHOD FOR PRODUCING THIN-FILM TRANSISTOR ARRAYS OF LIQUID-CRYSTAL SCREENS	1994	Kazurov B.I. Sulimin A.D. Shishko V.A. Prikhod'Ko E.L.	RU2069417C1
PROCESS OF MANUFACTURE OF BIPOLAR COS/MOS STRUCTURE	1998	Lukasevich M.I. Gornev E.S. Morozov V.F. Trunov S.V. Ignatov P.V. Shevchenko A.P.	RU2141149C1
METHOD FOR PRODUCING CONGRUENT BIPOLAR CMOS DEVICE	2005	Gribova Marina Nikolaevna Manzha Nikolaj Mikhajlovich Rygalin Boris Nikolaevich Saurov Aleksandr Nikolaevich	RU2295800C1
PROCESS OF MANUFACTURE OF BIPOLAR TRANSISTOR	1995	Lukasevich M.I.	RU2099814C1
PROCESS OF MANUFACTURE OF BICOS/BIMOS DEVICE	1998	Krasnikov G.Ja. Lukasevich M.I. Morozov V.F. Savenkov V.N.	RU2141148C1

RU 2 185 686 C2

Authors

Manzha N.M.

Klychnikov M.I.

Kravchenko D.G.

Kechkova E.A.

Dates

2002-07-20—Published

2000-03-16—Filed