FIELD: processes and equipment for growing silicon monocrystals by Czochralski method, namely apparatuses for recharging material to crucible, possibly in plants for growing silicon monocrystals provided with sluice or semicontinuous growing of monocrystals. SUBSTANCE: apparatus includes reservoir rigidly joined with fixing ring; supporting members arranged in lower end of reservoir; unit for securing reservoir to motion mechanism in which fixing ring is arranged outside of reservoir. The last is provided with openable bottom; unit for securing reservoir is in the form of successively joined flexible tie rods passing on lateral surface along rectilinear generatrix of reservoir at its two opposite sides and forming suspension over upper base of reservoir. Lower end of each terminal tie rod is movably joined with respective supporting member. EFFECT: improved design of apparatus providing controlled discharge of material out of reservoir. 7 cl, 4 dwg
Title | Year | Author | Number |
---|---|---|---|
METHOD OF GROWING MONOCRYSTALS FROM MELT | 2000 |
|
RU2200775C2 |
METHOD OF PREPARING SILICON MONOCRYSTALS INVOLVING MONOCRYSTAL GROWTH DISRUPTION | 2000 |
|
RU2189407C2 |
SILICON MONOCRYSTAL GROWING APPARATUS, SCREENING DEVICE AND CRYSTAL GROWING PROCESS BY CHOKHRALSKY METHOD | 2002 |
|
RU2231582C1 |
TECHNIQUE OF FURNACE FEED ADDITIONAL CHARGING DURING PROCESS OF SILICON SINGLE CRYSTAL GROWING BY CZOCHRALSKI METHOD | 2007 |
|
RU2343234C1 |
METHOD OF DETERMINING DEFECTLESS ZONE OF SILICON MONOCRYSTAL | 2000 |
|
RU2189408C2 |
PROCEDURE CHECKING DIAMETER OF SILICON MONOCRYSTAL GROWN FROM MELT | 2000 |
|
RU2189406C2 |
METHOD OF PREPARING CRUCIBLE FOR GROWING OF MONOCRYSTALLINE SILICON INGOT | 2005 |
|
RU2286407C1 |
MONOCRYSTALLINE SILICON OBTAINING METHOD | 1995 |
|
RU2057211C1 |
METHOD FOR GROWING OF HOLLOW CYLINDRICAL SINGLE CRYSTALS OF SILICON BASED ON CHOKHRALSKY METHOD AND DEVICE FOR ITS REALISATION | 2007 |
|
RU2355831C2 |
DEVICE FOR GROWING OF REFRACTORY SINGLE CRYSTAL | 2008 |
|
RU2361020C1 |
Authors
Dates
2002-09-27—Published
2000-01-31—Filed