SEMICONDUCTOR MEMORY DEVICE WITH CAPACITORS FORMED ABOVE AND BELOW MEMORY LOCATION TRANSISTOR (ALTERNATIVES) AND ITS MANUFACTURING PROCESS Russian patent published in 2002 - IPC

Abstract RU 2194338 C2

FIELD: dynamic random-access memory devices. SUBSTANCE: memory device has first and second transistors formed on first layer; first storage electrode connected to first transistor and made under first layer; and second storage electrode connected to second transistor and made under first layer. First and second storage electrodes are connected to each source through spacer formed on side walls of each source; some spots between storage electrodes and transistors are etched. Proposed design ensures twice as large and still larger memory capacity. EFFECT: enlarged memory capacity, enhanced stability of transistor characteristics, reduced channel contraction effect. 16 cl, 10 dwg

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RU 2 194 338 C2

Authors

Li Dzhoo Jang

Dates

2002-12-10Published

1995-05-12Filed