METHOD AND APPARATUS FOR DEPOSITION OF BIAXIALLY ORIENTED TEXTURED COATINGS Russian patent published in 2004 - IPC

FIELD: mechanical engineering. SUBSTANCE: method involves providing bombardment during deposition of high-energy particles at controlled angle. Deposition of biaxially oriented coatings on substrate 6 is carried out by means of at least one magnetron spraying devices 1 generating flow of material to be deposited and high-energy particle beam 5 with controlled direction and, accordingly, with controlled angle of incidence onto substrate 6. Magnetron spraying source 1 generates high-energy particle beam 5 together with material to be deposited. EFFECT: simplified method allowing single source to be used for producing of material to be deposited and high- energy particle beam, and wider range of use in various branches of industry. 17 cl, 7 dwg