METHOD FOR PRODUCING DIAMOND-LIKE FILMS FOR ENCAPSULATING SOLAR PHOTOCELLS Russian patent published in 2005 - IPC

FIELD: metal science; protection of materials against external and corrosive attacks.

SUBSTANCE: proposed method for producing diamond-like films designed for encapsulating solar photocells to protect them against chemical, radiation, and mechanical damage includes variation of ion kinetic energy, plasma discharge current, and spatial density distribution of plasma incorporating C⁺, H⁺, N⁺, and Ar⁺ ions by acting upon ion current from radial source with electric field built up by stop-down, neutralizing, and accelerating electrodes. Spatial plasma distribution is checked for uniformity by measuring plasma current density on solar photocell surface whose temperature is maintained not to exceed 80 ^oC. In the process substrate holder makes complex axial movement in three directions within vacuum chamber. Diamond-like films produced in the process on solar photocell surface area over 110 cm² are noted for uniformity, difference in their optical parameters variable within desired range is not over 5%.

EFFECT: enhanced adhesive property, microhardness, and resistance of films to corrosive attacks.

5 cl, 12 dwg, 2 tbl