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2 265 913

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IPC

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Application

2003136308/28, 2003-12-15

(24)

Start date

2003-12-15

(22)

Actual filing date

2003-12-15

(45)

Published

2005-12-10

(72)

Inventor

Korljakov A.V.Luchinin V.V.Belykh S.V.

(73)

Holder

Gosudarstvennoe Obrazovatel'Noe Uchrezhdenie Vysshego Professional'Nogo Obrazovanija Gosudarstvennyj Ehlektrotekhnicheskij Universitet Im. V.I. Ul'Janova Gehtu)

PERFORATED MEMBRANE FOR SENSING ELEMENT OF MICROMECHANICAL INSTRUMENT Russian patent published in 2005 - IPC

Abstract RU 2265913 C2

FIELD: microelectronic instrumentation engineering; sensing elements of micromechanical instruments.

SUBSTANCE: proposed membrane of micromechanical instrument sensing element is perforated by through holes to form trigonal or tetragonal figures disposed so as to provide for intersection of lines interconnecting centers of adjacent figures by perforation elements.

EFFECT: enhanced reliability, sensitivity, and manufacturability of sensing elements.

1 cl, 6 dwg, 1 tbl

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RU 2 265 913 C2

Authors

Korljakov A.V.

Luchinin V.V.

Belykh S.V.

Dates

2005-12-10—Published

2003-12-15—Filed