METHOD FOR SELECTING INTEGRATION CIRCUITS OF INCREASED RELIABILITY Russian patent published in 2006 - IPC G01R31/26 H01L21/66 

Abstract RU 2269790 C1

FIELD: electric engineering, in particular, manufacturing and operation of integration circuits, possible use for selecting integration circuits of increased reliability with high trustworthiness level during production.

SUBSTANCE: batch of integration circuits is affected by electrostatic discharges with potentially on the limit of one allowed in accordance to technical specifications. After that temperature annealing is performed at maximal allowed transfer temperature during 4-8 hours with measurement of value of critical power voltage after effect of electrostatic charges and annealing. As a result of method, batch of integration circuits is detected having increased reliability. Selection of integration circuits of increased reliability is performed based on criterion K ≤ 0, calculated in accordance to formula K = (Ecr.ann - Ecr.s)/(Ecr.e - Ecr.ann), where Ecr.s, Ecr.e, Ecr.ann - values of critical power voltage before, after effect of electrostatic discharges and after annealing, respectively.

EFFECT: increased trustworthiness of method.

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RU 2 269 790 C1

Authors

Gorlov Mitrofan Ivanovich

Gorlov Evgenij Nikolaevich

Koz'Jakov Nikolaj Nikolaevich

Emel'Janov Anton Viktorovich

Dates

2006-02-10Published

2004-10-06Filed