SPRAYING CATHODE FOR COAT APPLICATION PROCESSES Russian patent published in 2006 - IPC C23C14/35 H01J37/34 

FIELD: metallurgy; spraying cathodes for application of coats in vacuum chamber; manufacture of articles provided with coats.

SUBSTANCE: proposed cathode has at least one solid target (2) mounted on metal membrane (3). Side of membrane (3) directed from target (2) has cooling passage with delivery line (9) and drain line (10) for cooling fluid and cavity (7) for at least one magnetic system (5) which is located in bath (6) which is sealed relative to membrane (3) and is not subjected to action of cooling fluid. Cathode is located on load-bearing structure (12) which has hollow body (13) hermetically closed relative to interior of vacuum chamber (18); it is used for communication of magnetic system (5) and cavity (7) with atmosphere beyond vacuum chamber (18). Cooling passage is made in form of closed water supply pipe (4) closed over perimeter of section with at least one flat side (4a) which is in heat-conducting connection with membrane (3). Membrane (3) and surfaces of water supply pipe (4) directed away from membrane (3) are subjected to atmospheric pressure through load-bearing structure (12) beyond vacuum chamber (18). Such construction of cathode enhances transfer of heat from target to cooling fluid excluding penetration of it into vacuum chamber.

EFFECT: enhanced operational and economical efficiency.

8 cl, 6 dwg