METHOD FOR PRODUCING MICROWAVE AND EXTREMELY HIGH-FREQUENCY ENERGY OUTPUT WINDOW FOR ELECTRONIC DEVICES Russian patent published in 2006 - IPC H01P1/08 

FIELD: producing waveguide components of microwave and extremely high-frequency devices.

SUBSTANCE: desired configuration of dielectric plate is attained by vacuum evaporation of metalized double-layer vacuum coat, 0.5-10 μm thick, first layer being adhesive and second one, conductive, followed by lithography and cutting. Dielectric plate is made proportional to internal dimensions of metal waveguide channel and metalized coat is provided with central hole. Metal membrane, 3-300 μm thick, is made by electroplating of corrosion-resistant flexible metal characterized in good soldering and welding ability on properly conducting metal, 0.5-100 μm thick, and lithography is made on conducting metal layer. Dielectric plate is connected to membrane by means of metalized coat of dielectric plate; in the process holes in membrane and in metalized coat of dielectric plate are aligned and dielectric plate connected to membrane is disposed directly in metal waveguide channel at high atmospheric pressure of gas followed by evacuating microwave and extremely high-frequency device.

EFFECT: reduced labor consumption and manufacturing cost, enhanced reliability.

11 cl, 4 dwg