FIELD: microelectronics; production of integrated multicomponent photodetectors.
SUBSTANCE: proposed photodetector cell characterized in process compatibility with standard CMOS technology has at least one p-n junction in substrate of first polarity of conductivity buried at certain depth from surface coated with silicon dioxide layer. At least part of surface above p-n junctions is coated with polycrystalline silicon layer whose thickness is great enough to suppress ultraviolet and blue parts of incident rays.
EFFECT: enlarged dynamic range.
4 cl, 2 dwg
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Authors
Dates
2006-12-27—Published
2003-07-09—Filed