ASSEMBLY FOR DOUBLE SIDED VERTICAL CLEANING OF THE SURFACE OF ROUND PLATES MADE OUT OF SEMI CONDUCTIVE AND OPTIC MATERIALS Russian patent published in 2008 - IPC H01L21/08 

FIELD: metallurgy.

SUBSTANCE: invention refers to fabrication of plates. An assembly for double sided vertical cleaning of the surface of round plates made out of semi conductive and optic materials consists of cleaning components, located on both sides of the treated plate, of a device to supply a washing solution onto both sides of the treated plate, it also consists of a support-and-guidance mechanism to support the treated plate and of a drive mechanism for cleaning components. The assembly also includes a mechanism for in - turn unloading of treated plates from a cartridge and transporting them to a treatment position, a centrifuge on one side of which a nozzle of a mega sound oscillation generator is assembled at a distance of 5-7-20 mm from the surface of the plate, the said nozzle is able to perform reciprocal movements from the center to the edge of the treated plate and to clean the surface of the treated plate with a jet of deionised water with the following mega sonic oscillation superposition, double-sided washing with deionised water, and centrifugal drying in nitrogen medium; the assembly also includes a mechanism of in-turn unloading of plates from the treatment position and loading them into the cartridge.

EFFECT: upgraded cleanness of plates, increased efficiency, and increased life time of cleaning components.

1 dwg