MICROMECHANICAL ACCELEROMETER Russian patent published in 2021 - IPC G01P15/00 

FIELD: instrumentation.

SUBSTANCE: invention relates to the field of instrumentation and can be used in the manufacture of micromechanical accelerometers, microgyroscopes, integral pressure sensors. The micromechanical accelerometer contains a base, a sensing element consisting of upper and lower covers, an inertial mass, a separating layer, and an adhesive sealant. The separating layer consists of a decoupling plane, a glass substrate, glass microspheres. On the one hand, microwells or grooves or depressions are formed in the decoupling plane, on the other hand, attachment pads to the lower cover of the sensitive element are formed, made along the periphery of the decoupling plane, glass microspheres are installed in microwells or grooves or grooves, adhesive sealant is applied between the decoupling plane - glass microspheres - a glass substrate.

EFFECT: improved accuracy of the micromechanical accelerometer.

3 cl, 4 dwg