METHOD FOR MANUFACTURING SUPERCONDUCTOR HETEROSTRUCTURE AROUND AB COMPOUNDS BY WAY OF LIQUID-PHASE EPITAXY Russian patent published in 2007 - IPC H01L21/208 

Abstract RU 2297690 C1

FIELD: methods for manufacturing heterostructure around A3B5 compounds by way of epitaxy.

SUBSTANCE: proposed method for manufacturing semiconductor heterostructure by way of epitaxy includes growth of epitaxial layer of desired thickness h0 mismatched over lattice perimeter with material whereon it is grown; prior to do so, experimental calibration curve is constructed for given growth system showing maximal layer thickness hmax at which its epitaxial growth still takes place as function of relative mismatch f between lattices at known mechanical strength of layer specified by Poisson's ratio, design calibration curve of minimal layer thickness hmin as function of lattice relative mismatch f at known mechanical strength of layer specified by Poisson's ratio is constructed, and relative lattice mismatch f of materials being joined at which h0 meets expression hmin < h0 < hmax, μm is chosen.

EFFECT: ability of generating sufficient number of effective recombination centers in base layers of device.

13 cl, 2 tbl

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RU 2 297 690 C1

Authors

Soldatenkov Fedor Jur'Evich

Dates

2007-04-20Published

2005-10-24Filed