FIELD: sources of VUV photons and reactive particles.
SUBSTANCE: flexible arc source of VUV comprises discharge tube made of cooled metal sections with protective coating, field arc cathode with containment of arc cathode spots in working space, anode, and system for working gas export or puffing. In tube sections, perpendicular to discharge axis, side holes are made, their size comparable to section length. These holes are used for tight securing of supports being treated, either with masks or without them.
EFFECT: possibility for irradiation, etching and buildup of materials on supports of large total area of treatment, using reactive particles and VUV photons emitted by nearly entire discharge side surface.
2 cl, 1 dwg
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