METHOD OF QUANTUM WELLS MIXING WITHIN SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DEVICE STRUCTURE MADE ACCORDING TO THIS METHOD Russian patent published in 2008 - IPC H01L21/285 

Abstract RU 2324999 C2

FIELD: light devices production.

SUBSTANCE: method of quantum wells mixing within semiconductor device implies: a) formation of layer structure with quantum wells including doped upper layer; b) formation of etch preventing layer over mentioned upper layer; c) formation of temporary layer over mentioned etch preventing layer, and mentioned etch preventing layer has significantly lower etch rate than mentioned temporary layer on condition that etching requirements are preliminary specified; d) process of quantum wells mixing upon device structure making significant violation of at least a part of consumed layer; e) removal of temporary layer from at least device contact area by etching selective relative to etch preventing layer to uncover mentioned etch preventing layer within contact area; and f) formation of contact over layer structure with quantum wells directly on the surfaced uncovered after execution of stage e) at least within mentioned contact area.

EFFECT: improvement of device contact resistance.

15 cl, 10 dwg

Similar patents RU2324999C2

Title Year Author Number
PROCESS OF SEMICONDUCTOR DEVICE MANUFACTURING IN SEMICONDUCTOR STRUCTURE AND DEVICE OBTAINED IN THIS PROCESS 2003
  • Nehzhda Stiven Piter
RU2328065C2
METHOD FOR PRODUCING RESISTIVE CONTACT LAYER AND SEMICONDUCTOR DEVICE OF GROUPS II-VI 1992
  • Khaas Majkl A.
  • Cheng Khva
  • Dep'Judt Dzhejms M.
  • Ki Jun
RU2151457C1
METHOD FOR MANUFACTURING OPTICAL DEVICES 2002
  • Marsh Dzhon Khejg
  • Makdugall Stjuart Dankan
  • Khamil'Ton Krejg Dzhejms
  • Koval'Ski Olek Piter
RU2291519C2
METHOD FOR MANUFACTURING OPTICAL DEVICES AND APPROPRIATED DEVICES 2002
  • Marsh Dzhon Khehjg
  • Gamil'Ton Krehjg Dzhejms
  • Koval'Ski Olek Piter
  • Makdugall Stjuart Dunkan
  • Lju Sjueh Fehn
  • Tsju Botsan
RU2335035C2
III-NITRIDE LIGHT-EMITTING DEVICE HAVING LIGHT-EMITTING AREA WITH DOUBLE HETEROSTRUCTURE 2006
  • Shehn' Juj-Chehn'
  • Gardner Natan F.
  • Vatanabe Satosi
  • Krejms Majkl R.
  • Mjuller Gerd O.
RU2412505C2
BLUE-AND-GREEN LASER DIODE 1992
  • Khaas Majkl A.
  • Cheng Khva
  • Dep'Judt Dzhejms M.
  • Ki Jun
RU2127478C1
CONTACT FOR SEMICONDUCTOR LIGHT-EMITTING DEVICE 2008
  • Aldaz Rafaehl I
  • Ehpler Dzhon I.
  • Grijo Patrik N.
  • Krejms Majkl R.
RU2491683C2
SEMICONDUCTOR LASER (VERSIONS) 2012
  • Nekorkin Sergej Mikhajlovich
  • Zvonkov Boris Nikolaevich
  • Kolesnikov Mikhail Nikolaevich
  • Dubinov Aleksandr Alekseevich
  • Aleshkin Vladimir Jakovlevich
RU2529450C2
HIGH-POWER MICROWAVE FIELD-EFFECT TRANSISTOR BASED ON SEMICONDUCTOR HETEROSTRUCTURE 2021
  • Pashkovskij Andrej Borisovich
  • Lapin Vladimir Grigorevich
  • Lukashin Vladimir Mikhajlovich
  • Makovetskaya Alena Aleksandrovna
  • Bogdanov Sergej Aleksandrovich
  • Tereshkin Evgenij Valentinovich
  • Zhuravlev Konstantin Sergeevich
RU2781044C1
INJECTION LASER MANUFACTURING PROCESS 2000
  • Chel'Nyj A.A.
  • Kobjakova M.Sh.
  • Morozjuk A.M.
  • Aluev A.V.
RU2176841C1

RU 2 324 999 C2

Authors

Nadzhda Stiven

Makdugol Stjuart Dankan

Liu Ksuefeng

Dates

2008-05-20Published

2003-05-21Filed