METHOD OF MAKING SILICON CARBIDE FILMS ON SILICON SUBSTRATE Russian patent published in 2008 - IPC H01L21/26 

Abstract RU 2341847 C1

FIELD: physics.

SUBSTANCE: proposed method of making silicon carbide on a silicon substrate involves heating the silicon substrate in a medium of carbon containing gases using pulse packets of xenon lamp radiation in the 0.2-1.2 mcm range, with pulse duration of 10-2 s, for a period of 1.5-2 s with density of the radiation of 240-260 J·cm-2.

EFFECT: simple technology; shorter time for making the product.

2 cl, 4 ex, 1 tbl, 4 dwg

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RU 2 341 847 C1

Authors

Ievlev Valentin Mikhajlovich

Kannykin Sergej Vladimirovich

Kushchev Sergej Borisovich

Soldatenko Sergej Anatol'Evich

Fedorova Elena Nikolaevna

Chernikov Nikolaj Vladimirovich

Dates

2008-12-20Published

2007-04-23Filed