FIELD: technological processes.
SUBSTANCE: method for scribing of brittle material includes radiation with pair of beam spots on every side of central line, along which material has to be separated, so that material is heated up to the temperature, which is below softening point. Then material is locally cooled along line of material separation, therefore, vertical crack is deepened and moved along line of mentioned material separation, starting from initial crack formed on mentioned material. Pair of beam spots is radiated with laser beam having distribution of radiation energy, which is normal distribution, and this distribution of radiation energy has two peak sections accordingly along two sections of long side, which are located at the distance from each other along width W with central line of material separation, and with zero radiation energy between these two peak sections.
EFFECT: provision of high quality and strength on separated surface of substrate.
19 cl, 25 dwg
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Authors
Dates
2009-05-10—Published
2005-09-30—Filed