METHOD OF MAKING THIN-FILM SOLAR MODULE WITH SCRIBING LAYERS Russian patent published in 2020 - IPC H01L31/18 

FIELD: physics.

SUBSTANCE: invention relates to production of thin-film solar module (TPSM). Method of making a thin-film solar module involves successively depositing on the glass substrate a layer of a frontal transparent conductive contact, a layer of hydrogenated amorphous and microcrystalline silicon (a-Si:H/μc-Si:H) and a layer of a frontal transparent conductive contact. After the layer of the frontal transparent conductive contact is deposited, its continuous laser scribing is performed to form a groove, wherein after the deposition of the layer of hydrogenated amorphous and microcrystalline silicon (a-Si:H/μc-Si:H), discontinuous laser scribing of said layer is performed with formation of holes, and after the layer of the back transparent conducting contact layer deposition operation, this layer is separated by continuous laser scribing, at which layers of hydrogenated amorphous and microcrystalline silicon and back transparent conductive contact are simultaneously removed to form a groove. Connection of front and rear transparent conducting contacts is performed through holes of a layer of hydrogenated amorphous and microcrystalline silicon formed after interrupted laser scribing of this layer.

EFFECT: invention enables to increase the photoactive area by reducing the dead zone.

3 cl, 4 dwg