METHOD FOR PRODUCTION OF THIN ANTIREFLECTION LAYERS BASED ON MESOPOROUS SILICON DIOXIDE BY SOL-GEL METHOD IN PRESENCE OF ORGANIC ACIDS, FUNCTIONAL DERIVATIVES OF ORGANIC ACIDS, ESTERS OF ORGANIC ACIDS Russian patent published in 2009 - IPC C03C17/30 

Abstract RU 2368575 C2

FIELD: construction.

SUBSTANCE: thin monostratal antireflection layers with thickness of 50-200 nm and with refractive index of 1.27-1.40 are produced by sol-gel method of silicon tetraalcoxide in presence of organic additive in concentration of 0.1-5.0 wt % to sol weight. Organic additive used is represented by monobasic, bibasic and polybasic organic acids, functional derivatives of organic acids, which contain groups - OH, -NH2, >NH, >CO, esters of organic acids.

EFFECT: reduction of refractive index of antireflection nanoporous layer.

6 ex, 6 dwg

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Authors

Troitskij Boris Borisovich

Babin Aleksej Aleksandrovich

Lopatin Mikhail Aleksandrovich

Denisova Valentina Nikolaevna

Novikova Marija Aleksandrovna

Mamaev Jurij Anatol'Evich

Khokhlova Ljudmila Vasil'Evna

Dates

2009-09-27Published

2007-11-07Filed