METHOD FOR PRODUCTION OF THIN ANTIREFLECTION LAYERS BASED ON MESOPOROUS SILICON DIOXIDE BY SOL-GEL METHOD IN PRESENCE OF OLIGOMERS OF ETHYLENE OXIDE, OLIGOMERS OF PROPYLENE OXIDE Russian patent published in 2009 - IPC C03C17/30 

Abstract RU 2368576 C2

FIELD: construction.

SUBSTANCE: layers are produced by sol-gel method of silicon tetraalcoxide in presence of organic additive in concentration of 0.1-5.0 wt %. Organic additive used is represented by oligomers of ethylene oxide and oligomers of propylene oxide of different molecular mass. Then sample with layer is heated in air atmosphere at 300-600°C for several hours. As a result of performed operations, thin monostratal antireflection layers are produced with thickness of 50-200 nm and with low refractive index equal to 1.23-1.25.

EFFECT: reduced refractive index of antireflection nanoporous layer.

4 ex, 4 dwg

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Authors

Troitskij Boris Borisovich

Lopatina Tat'Jana Ivanovna

Denisova Valentina Nikolaevna

Novikova Marija Aleksandrovna

Khokhlova Ljudmila Vasil'Evna

Dates

2009-09-27Published

2007-12-25Filed