METHOD OF CONTROLLING METAL COATING QUALITY Russian patent published in 2010 - IPC H01L21/66 

FIELD: physics.

SUBSTANCE: invention relates to microelectronics and serves to control quality of metal coating electronic devices during their manufacture. The method of controlling quality of metal coating electronic devices used a test structure made in form of a metal coating track. Direct current is passed through the track. The thermal profile of the track is scanned by moving a thermal detector. Coordinates of points with maximum temperature are determined and temperature derivative values on the length of the conductor are calculated for each point. Exploitation time until electrodiffusion failure is determined from the derivative value, and the sign of the derivative determines the origin and type electrodiffusion defects related to depletion and accumulation of conductor material.

EFFECT: method improves quality of diagnosing electrodiffusion defects of metal coating electronic devices.

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