APPARATUS FOR TESTING CASCADE PHOTOCONVERTER CHIPS BASED ON Al-Ga-In-As-P Russian patent published in 2010 - IPC G01N21/88 G01R31/308 

FIELD: physics.

SUBSTANCE: apparatus for testing cascade photoconverter chips based on Al-Ga-ln-As-P includes a laser (1) with radiation wavelength of 0.40-0.55 mcm, a radiation modulator (2), a lens (3), a platform (6) for placing the matrix (5) of chips (4) under test, an objective lens (7), optical filters (8, 9) which transmit in the (0.6-0.8) mcm range, an opaque circular screen (10) and a photodetector (11) which is sensitive to radiation with wavelength longer than 0.6 mcm, mounted on the same optical axis. The screen (10) is mounted in front of the photodetector (11) and shields its central part from photoluminescent radiation from the irradiated part of the chip, where the photodetector is connected through a narrow-band amplifier (12) to a controller (13) with a memory unit (14). The said laser has radiation wavelength of 0.53 mcm and is made from yttrium aluminium garnet doped with neodymium and has a frequency doubling device. The apparatus also has two stepper motors connected to the controller for back-and-forth movement of the base in two mutually perpendicular directions.

EFFECT: simplification of the testing process and cutting on time spent on testing separate chips.

3 cl, 1 ex