METHOD FOR ANALYSIS OF COMPOSITION OF GAS MIXTURE AND DEFINITION OF CONCENTRATION OF ITS COMPONENTS AND DEVICE FOR ITS IMPLEMENTATION Russian patent published in 2010 - IPC G01N27/12 

FIELD: measurement equipment.

SUBSTANCE: invention relates to gas analysis, in particular - to methods and devices for identification of composition of multicomponent gas mixtures characterised by enhanced sensitivity to small concentrations of gas mixture components. The method for analysis of composition of a gas mixture and definition of concentration of its components envisages heating a gas sensitive metal oxide layer to a temperature of 100-400°C, placement of the heated layer in the gas mixture under study, application of an electrical voltage along the surface of the gas sensitive metal oxide layer with subsequent change of distribution of potential between the electrical voltage application points, processing the measured distributions of potential by way of image identification methods and comparison of the processing results with preliminarily obtained calibration results for the known gases whereby one concludes on the gas mixture composition and concentration of its components. The calibration results for the known gases are obtained in accordance with a sequence similar to that used for the gas under study. For implementation of the method one proposes a device - a multielectric sensor containing a dielectric substrate with heater elements and a gas sensitive metal oxide layer applied onto its surface, strip electrodes positioned along the edges of the gas sensitive layer and at least a single measurement electrode positioned between the strip electrodes. The strip electrodes are equipped with outlets for connection to a voltage source while the measurement electrodes are equipped with outlets for connection to a potential measurement device.

EFFECT: invention provides for possibility to identify gas admixtures especially in small concentrations and formation sensor device microelectronics (with the help of group technologies) based on metal oxide layers with minimised impact of electrodes and/or electrode material characterised by small weight-dimension characteristics and low energy consumption.

9 cl, 8 dwg