FIELD: physics, semiconductors.
SUBSTANCE: invention relates to micro- and nanotechnology and can be used for non-destructive inspection of integrated circuit topologies. The method of inspecting integrated circuits (IC) involves creation of its physical model in a "silicon-on-insulator" semiconductor structure, the back surface of which is transparent for infrared radiation with subsequent inspection of the topology of the IC from the back surface of the "silicon-on-insulator" semiconductor structure in the infrared band from 940 to 1050 nm under a microscope fitted with a photodetector based on a CCD matrix. A model connected to an electric power supply can also be inspected.
EFFECT: increased information content of non-destructive inspection of ICs.
2 cl, 3 dwg, 1 ex
| Title | Year | Author | Number |
|---|---|---|---|
| METHOD FOR GROWING SEMICONDUCTOR FILM | 2023 |
|
RU2814063C1 |
| METHOD OF CONTROLLING SURFACE ROUGHNESS BASED ON REFLECTED GIGANTIC SECOND HARMONIC GENERATION EFFECT | 2009 |
|
RU2421688C2 |
| METHOD OF INSPECTING QUALITY OF LED STRUCTURE | 2012 |
|
RU2521119C1 |
| METHOD OF FORMING HIGH-QUALITY MOS STRUCTURES WITH POLYSILICON GATE | 2012 |
|
RU2524941C2 |
| TUNABLE SUB-TERAHERTZ RANGE HETERODYNE CRYOGENIC GENERATOR BASED ON DISTRIBUTED TUNNEL JUNCTION FOR INTEGRATED RECEIVING SYSTEMS | 2012 |
|
RU2522711C2 |
| METHOD OF MEASURING LOCAL ELECTROMAGNETIC FIELDS ON SURFACE OF HETEROSTRUCTURES | 2012 |
|
RU2491679C1 |
| METHOD OF PROTECTION AGAINST COUNTERFEITING OF VALUABLE PRODUCTS AND CONTROL OF THEIR AUTHENTICITY | 2022 |
|
RU2807430C1 |
| METHOD OF MAKING PHOTOELECTRIC ELEMENT BASED ON GERMANIUM | 2008 |
|
RU2377698C1 |
| METHOD OF CREATING THROUGH MICRO CHANNELS WITH DIAMETERS OF MICRON AND SUBMICRON SIZES IN SILICON CRYSTAL WITH HELP OF LASER PULSES | 2015 |
|
RU2592732C1 |
| METHOD OF DURABILITY ASSESSMENT FOR THIN PROTECTIVE COATINGS ON MATERIALS UNDER HIGH ENERGY EFFECTS | 2013 |
|
RU2530784C1 |
