METHOD OF MAKING SURFACE ACOUSTIC WAVE RESONATORS Russian patent published in 2013 - IPC H01L41/22 

FIELD: radio engineering, communication.

SUBSTANCE: method of making surface acoustic wave resonators involves etching a quartz substrate, depositing a metal coating on the substrate, making resonator structures, mounting resonators in a housing and dry treatment in two steps, the first step involving removal of organic residues from the surface of the resonators in the plasma of a mixture of oxygen and an inert gas, the inert gas used being either helium, neon or argon, with high-frequency power density of 0.02-0.08 W/cm³ and pressure of 80-150 Pa, oxygen content of 3-15 vol. %, inert gas content of 85-97 vol. %, and the second step involving tuning the frequency of the resonators by reactive ion-beam etching in a fluorine-containing discharge.

EFFECT: longer frequency stability of surface acoustic wave resonators owing to removal of organic residues from the resonators and higher degree of purity by adding an inert gas into oxygen plasma and by tuning frequency of the resonators via reactive ion-beam etching in a fluorine-containing discharge.

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