METHOD OF OBTAINMENT OF NONVOLATILE STORAGE ELEMENT Russian patent published in 2012 - IPC H01L21/8239 

Abstract RU 2468471 C1

FIELD: electricity.

SUBSTANCE: method of obtainment of nonvolatile storage element includes creation of lower conductive electrode, buffer insulating layer, layer with resistive switching and upper conductive electrode. According to the method, contact of nanosized scale is created to layer with resistive switching by means of electrical moulding of structure. Buffer insulating layer and layer with resistive switching are made of binary oxides using low-temperature vacuum-deposition technique. Availability of contact of nanosized scale to layer with resistive switching localises switch area.

EFFECT: increasing relation of resistances in low-resistance and high-resistance state, stabilising switch parameters, reducing risk of structure degradation, increasing total quantity of switch cycles.

3 cl, 2 dwg

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RU 2 468 471 C1

Authors

Putrolajnen Vadim Vjacheslavovich

Velichko Andrej Aleksandrovich

Stefanovich Genrikh Boleslavovich

Pergament Aleksandr Lionovich

Kuldin Nikolaj Aleksandrovich

Dates

2012-11-27Published

2011-04-07Filed