FIELD: physics.
SUBSTANCE: present invention relates to growth techniques and designs of semiconductor light-emitting devices. The method of making a light-emitting device according to the invention involves steps for growing a III nitride structure on a substrate, wherein the III nitride structure has a template which in turn has a first layer grown directly on the substrate, wherein the first layer essentially does not contain indium; a second layer grown over the first layer, wherein the second layer is a non-monocrystalline layer which contains indium; and a third layer grown over the second layer and in direct contact with the second layer, wherein the third layer is a non-monocrystalline layer which contains indium; and device layers grown over the template, device layers containing a III nitride light-emitting layer between an n-type region and a p-type region. Another version of the method of making the light-emitting device is also provided.
EFFECT: invention reduces stress in the light-emitting device, which can improve operating characteristics of the device.
29 cl, 18 dwg
Title | Year | Author | Number |
---|---|---|---|
III-NITRIDE LIGHT-EMITTING DEVICES, GROWN ON TEMPLATES TO REDUCE STRAIN | 2007 |
|
RU2454753C2 |
III-NITRIDE LIGHT-EMITTING DEVICES, GROWN ON STRUCTURE FOR REDUCING DEFORMATION | 2007 |
|
RU2466479C2 |
BORON-CONTAINING III-NITRIDE LIGHT-EMITTING DEVICE | 2010 |
|
RU2523747C2 |
LIGHT-EMITTING DEVICE OF ELEMENTS OF III-V GROUPS THAT INCLUDES LIGHT-EMITTING STRUCTURE | 2010 |
|
RU2559305C2 |
SEMICONDUCTOR LIGHT-EMITTING DEVICES GROWN ON COMPOSITE WAFERS | 2009 |
|
RU2515205C2 |
LIGHT-EMITTING DEVICE BASED ON NITRIDE OF GROUP III ELEMENT WITH LIGHT-EMITTING LAYER WITH REDUCED VOLTAGES | 2012 |
|
RU2591246C2 |
LIGHT-EMITTING DEVICE BASED ON NITRIDE OF GROUP III ELEMENT, HAVING LOW-STRESS LIGHT-EMITTING LAYER (VERSIONS) | 2007 |
|
RU2457581C2 |
III-NITRIDE LIGHT-EMITTING DEVICE HAVING LIGHT-EMITTING AREA WITH DOUBLE HETEROSTRUCTURE | 2006 |
|
RU2412505C2 |
NON-POLAR III-NITRIDE MATERIAL, METHOD FOR ITS PRODUCTION, CONTAINING IT ELECTRONIC DEVICE AND MULTILAYER MATERIAL | 2020 |
|
RU2837760C1 |
WHITE LIGHT-EMITTING DIODE BASED ON NITRIDE OF GROUP III METAL | 2005 |
|
RU2379787C2 |
Authors
Dates
2012-12-20—Published
2007-12-21—Filed