FIELD: electricity.
SUBSTANCE: in design of a crystal of an arsenide-gallium diode in epitaxial anode and cathode areas of a structure the profile of concentration of an alloying admixture is distinct stepped with sharp-smooth-sharp decrease and increase of differential concentration of donor and acceptor admixtures. The crystal of the ultrafast powerful high-voltage arsenide-gallium diode comprises a highly alloyed single-crystal substrate of the first type of conductivity with concentration of the alloying admixture of at least 1019 cm-3; the epitaxial layer of the first type of conductivity with areas of sharp, smooth, sharp reduction of differential concentration of donor and acceptor admixtures from the level of concentration in a substrate of 1019 cm-3 to less than 1011 cm-3; the epitaxial layer with differential concentration of donor and acceptor admixtures of 1011 cm-3; the epitaxial layer of the second type of conductivity with areas with sharp, smooth, sharp increase of differential concentration of donor and acceptor admixtures from 1011 cm-3 to 1018 cm-3 and higher.
EFFECT: improved dynamic properties, expanded range of working voltages, increased density of currents, higher thermodynamic resistance of high-voltage ultrafast arsenide-gallium diodes.
2 cl, 1 dwg
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Authors
Dates
2013-01-10—Published
2009-12-31—Filed