FIELD: electronics.
SUBSTANCE: invention relates to electronic engineering and can be used in the manufacture of light-indicating technology products and emission electronics based on field emission of a matrix of multi-point carbon emitters on single-crystal silicon plates. Production of a matrix of a multi-tip auto-emission cathode is performed on a single-crystal silicon plate of the hole-type conductivity in the plasma of a microwave gas discharge by precipitation from vapors of carbonaceous substances, for example ethanol, carbon coatings on silicon columnar nanostructures that are up to several tens of nanometers in height. Emission layers with a low transverse electric conductivity are used to increase the densities of field emission currents.
EFFECT: technical result is an increase in the stability and efficiency of field emission.
1 cl, 2 dwg
