METHOD OF INCREASING THE DENSITY AND STABILITY OF A MATRIX CURRENT OF A MULTIPLE AUTO-EMISSION CATHODE Russian patent published in 2018 - IPC H01J1/30 H01J9/02 

FIELD: electronics.

SUBSTANCE: invention relates to the field of electronic engineering and can be used in the manufacture of products of light-indicating equipment and emission electronics on the basis of field emission of a matrix of multi-point emitters on single-crystal silicon plates. Production of a matrix of a multi-tip autoemission cathode is carried out on single-crystal silicon plates in a plasma of a microwave gas discharge by precipitation from vapors of carbonaceous substances, for example ethanol, using the phenomena of self-organization and structuring of submonolayer carbon coatings into nano-island formations. To increase the amplification factor of the electric field and thereby reduce the operating stresses, formation of emission centers in the form of integral columnar nanostructures up to several tens of nanometers in height is carried out, which are obtained by highly anisotropic etching of silicon wafers using the obtained carbon island isoforms as a mask coating. To increase the density and stability of the field emission current, the matrix of a multi-tip autoemission cathode on the surface of single-crystal silicon undergoes a plasma treatment to remove the natural oxide coating in the freon 14 environment with a negative bias on the substrate holder.

EFFECT: technical result is an increase in the density and stability of field emission currents.

1 cl