FIELD: electricity.
SUBSTANCE: film planar voltage variable capacitor comprises a dielectric substrate, on the surface of which there is a layer of a ferroelectric material, working electrodes and contact sites arranged on the basis of the multi-layer metal structures from sputtered and galvanically grown layers of metals, the working electrodes of the voltage variable capacitor are made in the sputtered layer of aluminium applied onto the layer of the ferroelectric material.
EFFECT: improved durable stability of voltage variable capacitors.
6 dwg, 1 tbl
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