FIELD: electricity.
SUBSTANCE: when processing surfaces of substrates or processed parts with the help of a vacuum plasma discharge between an anode (9) and a cathode (7) a solid substance (19) is formed and deposited on an anode surface (21), and this substance has a higher specific impedance by DC compared to the specific DC impedance of the anode material. At least parts of the anode surface are screened against such deposition by establishment of a screening plasma (25) onto them. There are also versions of vacuum sources of plasma disclosed, which implement the proposed method.
EFFECT: expansion of plasma source functional capabilities.
36 cl, 16 dwg
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