METHOD OF PROCESSING NONMETALLIC MATERIALS Russian patent published in 2013 - IPC H01L21/42 

Abstract RU 2486628 C1

FIELD: process engineering.

SUBSTANCE: in compliance with this invention proposed method consists in irradiating material surface with pulse laser rays. Note here that laser pulse power density is generated on the basis of relationship that relates material sublimation specific energy, material absorption index in laser wave-length and material reflection factor.

EFFECT: electric power savings.

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RU 2 486 628 C1

Authors

Sakharov Mikhail Viktorovich

Kovalenko Aleksandr Fedorovich

Vorob'Ev Aleksej Aleksandrovich

Konjukhov Mikhail Vladimirovich

Astrauskas Jonos Iono

Nikitin Igor' Valer'Evich

Zaponov Arsenij Ehduardovich

Udintsev Roman Dmitrievich

Chupjatov Aleksandr Sergeevich

Dates

2013-06-27Published

2011-12-14Filed