INTEGRAL MICROMECHANICAL GYRO Russian patent published in 2013 - IPC G01C19/5656 

FIELD: instrument making.

SUBSTANCE: proposed gyro comprises dielectric substrate and two inertial weights coupled by elastic beams with internal frame. Internal frame is secured in external frame while the latter is secured at the base by torsions. Gyro base is arranged at dielectric substrate. Electrostatic vibrogear is composed of electrode plates arranged at internal frame and inertial weight comb structures.

EFFECT: possibility to measure angular velocity in axes X and Y mutually perpendicular in gyro dielectric substrate plane.

2 cl, 1 dwg