INTEGRAL MICROMECHANICAL GYROSCOPE Russian patent published in 2014 - IPC G01C19/5712 

FIELD: measurement equipment.

SUBSTANCE: gyroscope comprises two inertial masses, made in the form of plates with combed structures, where electrode plates are placed, which form flat capacitors with electrode plates fixed on combed structures of the dielectric substrate, and the flat capacitors are sensors of vibrations of inertial masses relative to the dielectric substrate. Each inertial mass is fixed in the frame with the help of elastic elements that are placed as capable of making reciprocal oscillations of inertial masses along two mutually perpendicular axes, arranged in the plane of the dielectric substrate. The frame is fixed on the dielectric substrate via torsions, which by some ends are rigidly connected to the frame, and by other ones - with a dielectric substrate. Inertial masses, the frame, elastic elements and combed structures fixed on the frame and two inertial masses are arranged with a gap relative to the dielectric plate.

EFFECT: invention provides for the possibility of measurement of a value of angular speed around axes X and Y, arranged mutually perpendicularly to plane of dielectric substrate of a gyroscope.

2 cl, 1 dwg