FIELD: physics.
SUBSTANCE: micromechanical component has at least three parts, which is ensured owing to that, according to the invention, the method of making the micromechanical component includes a step of forming at least one plate having a frame connected by at least one strap to the part of said component, having an opening, as well as a step of mounting said plate on a support, a step of fixing a dowel into the opening in the part to form a component, and a step of separating the formed component of each plate.
EFFECT: high accuracy of making a micromechanical component.
14 cl, 8 dwg
Authors
Dates
2013-11-10—Published
2009-11-04—Filed