FIELD: electricity.
SUBSTANCE: in this method dielectric layer is set to substrate from gas mixture containing components required to form dielectric material - silicone oxynitride. The gas mixture in non-isothermal mode passes through the heated spiral made of carbon material and characterised by the developed surface. A layer of silicone oxynitride with required thickness is formed, at that its content of oxygen and nitrogen must ensure compensation of internal mechanical stresses.
EFFECT: receiving dielectric layers that provide limit parameters of bolometer sensitivity, control value of internal mechanical stresses in the membrane dielectric layer, conform coating of relief grades.
6 cl
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