FIELD: physics.
SUBSTANCE: antireflection optical coating of SiO2 is deposited on a light-emitting GaN-n or GaN-p surface and a microrelief is formed in said coating in form of nano-spikes with density of 107-108 items/cm2. The present method enables to form a microrelief light-diffusing, light-emitting surface on both an n-type and p-type GaN without deterioration of heterostructure parameters.
EFFECT: high external quantum efficiency of GaN-based light-emitting diodes.
2 dwg, 1 ex
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Authors
Dates
2014-01-20—Published
2012-01-10—Filed