FIELD: physics.
SUBSTANCE: in the device of mechanical displacement for scanning probe microscope (SPM) comprising a base 1, an SPM head 2 provided with the first support 3, the second support 4, the third support 5, wherein the first support 3 is connected to the base 1 and provided with the first drive 6, mounted on the SPM head 2, the second support 4 and the third support 5 are also connected to the base, the second support 4 is provided with the second drive 7 mounted on the SPM head 2 and the third support 5 is provided with the third drive 8 mounted on the SPM head 2.
EFFECT: improved measurement accuracy.
6 cl, 2 dwg
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