PRESSURE SENSOR BASED ON NANO- AND MICROELECTROMECHANICAL SYSTEM OF BEAM TYPE Russian patent published in 2014 - IPC G01L9/00 B82B1/00 

FIELD: measurement equipment.

SUBSTANCE: invention relates to measuring equipment and can be used to measure pressure of liquid and gaseous corrosive media under the action of wide range of stationary and nonstationary temperatures. A device comprises a casing, a nano- and microelectromechanical system (NaMEMS) set in it and consisting of a diaphragm with a force-transferring stem connected with a beam having holes and slots, on the flat surface of the latter there is a heterogeneous structure formed from thin films of materials, terminal block, connecting leads. Resistance strain gages are formed within the heterogeneous structure of NaMEMS, they consist of identical strain elements connected by thin film jumpers included in the bridge measuring circuit. The strain elements are made as two trapeziums connected by their smaller bases by their central line. Note that layout of the strain elements on the beam flat surface depends on certain relations.

EFFECT: improved accuracy and sensitivity of a sensor.

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