PRESSURE METER BASED ON NANO- AND MICROELECTROMECHANICAL SYSTEM WITH BEAM ELASTIC ELEMENTS Russian patent published in 2017 - IPC G01L9/04 

FIELD: measurement equipment.

SUBSTANCE: pressure meter comprises a housing mounted therein nano- and micro-electromechanical systems (NandMEMS) consisting of membrane cushions power transmitting rod connected to the beam and having a slot opening on a flat surface which is formed from a heterogeneous structure of thin film materials, contact pads, the connecting conductors. Formed in a heterogeneous structure gages consist of identical tensor elements connected by jumpers included in a bridge measuring circuit. Tensor elements included into the opposite arms of a bridge measuring circuit are placed on a flat surface of the beam, and other centers of tensor elements included in the opposite arms of a bridge measuring circuit, are placed on a flat surface of the beam. The diameter of the holes, the thickness of the beam and the diameter of the power transmitting rod defined as the established relationships.

EFFECT: improved accuracy and sensitivity of the sensor.

2 dwg, 1 tbl