METHOD OF FORMING INSULATING LAYER USING LOW-ENERGY PARTICLES Russian patent published in 2014 - IPC H01L51/52 C23C14/06 B05D5/12 

Abstract RU 2522440 C2

FIELD: physics.

SUBSTANCE: invention relates to a method of providing a protective, passivation or sealing layer on an organic electronic device or a component thereof by depositing weakly accelerated particles by sputtering a beam of ions or plasma or by direct deposition of a beam of ions or plasma. The method is characterised by that the organic electronic device or component thereof is exposed to a beam of particles with predominant particle energy from 0.1 eV to 30 eV, thereby depositing a layer of said particles on the electronic device or component thereof. The invention also relates to a method of sealing an organic electronic device, a protective layer and an organic electronic device having said layer.

EFFECT: present invention provides a layer which does not damage an organic layer and has no or negligible negative impact on characteristics of the device.

16 cl, 2 tbl, 3 ex, 5 dwg

Similar patents RU2522440C2

Title Year Author Number
METHOD OF PRODUCING DIAMOND-LIKE CARBON AND DEVICE TO THIS END 2013
  • Semenov Aleksandr Petrovich
  • Semenova Irina Aleksandrovna
RU2567770C2
METHODS USING REMOTE ARC DISCHARGE PLASMA 2013
  • Gorokhovskij, Vladimir
  • Grant, Vilyam
  • Tejlor, Edvard, U.
  • Khyumenik, Devid
  • Brondum, Klaus
RU2640505C2
METHOD AND APPARATUS FOR PLASMA CHEMICAL DEPOSITION OF COATINGS 2001
  • Remnev G.E.
  • Isakov I.F.
  • Tarbokov V.A.
  • Makeev V.A.
RU2205893C2
GAS-DISCHARGE SPUTTERING APPARATUS BASED ON PLANAR MAGNETRON WITH ION SOURCE 2020
  • Semenov Aleksandr Petrovich
  • Semenova Irina Aleksandrovna
  • Tsyrenov Dmitrii Badma-Dorzhievich
  • Nikolaev Erdem Olegovich
RU2752334C1
PLATING METHOD OF NANO-COATING AND DEVICE FOR ITS IMPLEMENTATION 2008
  • Vinogradov Valentin Petrovich
  • Krauz Vjacheslav Ivanovich
  • Mjalton Viktor Vladimirovich
  • Smirnov Valentin Pantelejmonovich
  • Khimchenko Leonid Nikolaevich
RU2371379C1
METHOD FOR PRODUCING ELECTRODE COATINGS FOR OPTOELECTRONIC DEVICES BASED ON HALIDE PEROVSKITES 2022
  • Saranin Danila Sergeevich
  • Talbanova Nigina
  • Luchnikov Lev Olegovich
  • Ishteev Artur Rustemovich
  • Didenko Sergej Ivanovich
RU2797895C1
METHOD OF OBTAINING NANOSIZED CARBON LAYERS WITH DIAMOND PROPERTIES 2013
  • Semenov Aleksandr Petrovich
  • Semenova Irina Aleksandrovna
RU2532749C9
METHOD OF APPLYING WEAR-RESISTANT COATINGS AND IMPROVEMENT OF DURABILITY OF PARTS 1999
  • Paderov A.N.
  • Veksler Ju.G.
RU2161661C1
METHOD FOR ENCAPSULATING PHOTODETECTORS BASED ON HALIDE PEROVSKITES 2022
  • Saranin Danila Sergeevich
  • Luchnikov Lev Olegovich
  • Gostishchev Pavel Andreevich
  • Didenko Sergej Ivanovich
RU2806886C1
METHOD AND APPARATUS FOR DEPOSITION OF BIAXIALLY ORIENTED TEXTURED COATINGS 1999
  • De Griz Rozhe
  • Denjul' Jurgen
RU2224050C2

RU 2 522 440 C2

Authors

Majkl Kolle

Ouejn Llir Parri

Dejvid Sparrou

Oleg Jaroshchuk

Judzhin Telesh

Dates

2014-07-10Published

2009-11-18Filed