METHOD OF PRODUCING METAMATERIAL (VERSIONS) Russian patent published in 2014 - IPC H01Q1/38 

FIELD: physics.

SUBSTANCE: group of inventions relates to microelectronics - the technology of producing laminates - and can be used in making electrodynamic and/or antenna devices, having in their structure a layered material with specific electrical properties and which facilitate distortion of the operational electromagnetic field. The method does not include etching a sacrificial layer (liquid or plasma-chemical etching). The method of producing metamaterial includes forming, on n supporting plates, n protective layers on which are alternately formed m+1 levels of resonance structures and m dielectric layers, respectively; separating the formed alternating levels of resonance structures and dielectric layers with protective layers from the corresponding n supporting plates; successively connecting the separated alternating levels of resonance structures and dielectric layers with a protective layer through radio-frequency dielectric plates by assembling using alignment marks located in each level of resonance structures.

EFFECT: creating reproducible and stable processes of producing metamaterials, including multi-level materials, with quality and high-precision design of metal resonance structures without abruptions and etches.

13 cl, 3 dwg