DEVICE FOR PROCESSING PRODUCTS WITH FAST ATOMS Russian patent published in 2022 - IPC H01J27/04 

FIELD: products fast atoms processing.

SUBSTANCE: invention relates to a device for processing products with fast atoms. The device comprises a vacuum chamber, an anode installed inside the vacuum chamber, a discharge power supply connected between the anode and the vacuum chamber, a hollow body mounted on the vacuum chamber, a removable flange-holder of workpieces mounted on the hollow body, a high-voltage voltage input, a high-voltage generator voltage pulses, connected by the positive pole to the vacuum chamber, and by the negative pole to the high-voltage voltage input. The device is equipped with an accelerating grid in the form of a set of plane-parallel metal plates installed inside the hollow body at the boundary with the vacuum chamber and electrically connected to the high-voltage voltage input, and the parts of the plane-parallel metal plates facing the vacuum chamber have the shape of a segment of a circle.

EFFECT: expansion of operational capabilities by increasing the processing speed by reducing the cross section of the beam of fast atoms and increasing the density of their flux to the workpieces, as well as increasing the durability of the device by replacing a flat accelerating grid with a grid in the form of a set of plane-parallel metal plates.

1 cl, 2 dwg