METHOD FOR FORMATION OF SUPERCONDUCTING ULTRATHIN FILM YBaCuO ON DIELECTRIC SUBSTRATES Russian patent published in 2015 - IPC H01L39/24 

FIELD: process engineering.

SUBSTANCE: invention relates to laser spraying of superconducting ultrathin films of complex metal oxide compound like YBa₂Cu₃O_7-x by optimisation of parameters of laser radiation and postgrowth annealing in spraying chamber. It allows the production of ultrathin superconducting 12-25 nm deep films with surface irregularity of 1-2 nm. In compliance with this method, ceramic target YBa₂Cu₃O_7-x is subjected to dense laser radiation of 3·10⁸÷5·10⁸ W/cm², power and 1.06 mcm wavelength, pulse duration of 10-20 ns and pulse repetition rate of 10 Hz for 15÷30 s at 50÷100 Pa. Note here that target temperature makes 600÷700°C, substrate temperature equals 800-840°C. Superconducting 12-25 nm deep film results. Thereafter, at 840-780°C film is annealed at cooling rate of 4°C/min, at 780-700°C - at cooling rate of 10°C/min, at 700-400°C - at cooling rate of 15°C/min, at 400-20°C - at cooling rate of 19°C/min.

EFFECT: laser spraying of superconducting ultrathin films of complex metal oxide compound.

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