MICROWAVE PLASMA REACTOR FOR PRODUCTION OF SYNTHETIC DIAMOND MATERIAL Russian patent published in 2015 - IPC H01J37/32 C23C16/511 

FIELD: chemistry.

SUBSTANCE: microwave plasma reactor for production of synthetic diamond material by means of chemical precipitation from gas phase contains: microwave generator, configured for generation of microwaves at frequency f; plasma chamber, containing base, upper plate and lateral wall, stretching from base to upper plate, setting cavity resonator for supporting microwave resonance mode, with cavity resonator having central rotating axis of symmetry, stretching from base to upper plate, and upper plate is installed across central rotating axis of symmetry; configuration of microwave bond for supply f microwaves from microwave generator into plasma chamber, gas flow system for supply of technological gases into plasma chamber and their separation from there, and substrate holder, located in plasma chamber and containing supporting surface for substrate support, on which diamond material is precipitated when it is used. Cavity resonator is configured as having height, measured from base to upper plate of plasma chamber, supporting resonance mode TM011 between base and upper plate at said frequency f, with cavity resonator being additionally configured as the one that has diameter, measured at the height lower than 50% of cavity resonator height, measured from base, satisfying the condition that ratio of cavity resonator height to cavity resonator diameter is within the range from 0.3 to 1.0.

EFFECT: improvement of operating characteristics.

17 cl, 3 dwg